MEMS for Photonic Integrated Circuits
The work
| Authors | Carlos Errando-Herranz; Alain Yuji Takabayashi; Pierre Edinger; Hamed Sattari; Kristinn B. Gylfason; Niels Quack |
|---|---|
| Editors | |
| Type | article |
| Year | 2020 |
| Also known as | errandoherranz2019mems |
| Citekey | errandoherranz2020mems |
Where it appeared
| Published in | IEEE Journal of Selected Topics in Quantum Electronics |
|---|---|
| Publisher | IEEE Photonics Society |
| Volume | 26 |
| Issue | 2 |
| Pages | 1--16 |
Identifiers
| DOI | 10.1109/jstqe.2019.2943384 |
|---|---|
| OpenAlex | W2976859966 |
Access
| Landing page | https://doi.org/10.1109/jstqe.2019.2943384 |
|---|---|
| Free full text | https://ieeexplore.ieee.org/ielx7/2944/8764695/08847362.pdf |
From OpenAlex, which stores abstracts as an index of words and their positions: what is shown is rebuilt from that, and reads fluently whether or not it is what the author wrote.
Abstract
The field of microelectromechanical systems (MEMS) for photonic integrated circuits (PICs) is reviewed. This field leverages mechanics at the nanometer to micrometer scale to improve existing components and introduce novel functionalities in PICs. This review covers the MEMS actuation principles and the mechanical tuning mechanisms for integrated photonics. The state of the art of MEMS tunable components in PICs is quantitatively reviewed and critically assessed with respect to suitability for large-scale integration in existing PIC technology platforms. MEMS provide a powerful approach to overcome current limitations in PIC technologies and to enable a new design dimension with a wide range of applications.
How it got here
| How it got here | agent via openalex |
|---|---|
| Added | 2026-10-28 03:08 UTC |
| Not denied by | a person 2026-10-29 17:12 UTC |
Cite it as
@article{errandoherranz2020mems,
title = {MEMS for Photonic Integrated Circuits},
author = {Carlos Errando-Herranz and Alain Yuji Takabayashi and Pierre Edinger and Hamed Sattari and Kristinn B. Gylfason and Niels Quack},
year = {2020},
journal = {IEEE Journal of Selected Topics in Quantum Electronics},
publisher = {IEEE Photonics Society},
volume = {26},
number = {2},
pages = {1--16},
doi = {10.1109/jstqe.2019.2943384},
}
This record lives at https://refs.drheap.org/errandoherranz2020mems/ and will keep
doing so. It used to be called errandoherranz2019mems, and those addresses still resolve to this one.