Fabrication of single-crystal lithium niobate films by crystal ion slicing
The work
| Authors | M. Levy; Richard M. Osgood; R. Liu; Leslie Eric Cross; G. S. Cargill; Abhishek Kumar; H. Bakhru |
|---|---|
| Editors | |
| Type | article |
| Year | 1998 |
| Citekey | levy1998fabrication |
Where it appeared
| Published in | Applied Physics Letters |
|---|---|
| Publisher | American Institute of Physics |
| Volume | 73 |
| Issue | 16 |
| Pages | 2293--2295 |
Identifiers
| DOI | 10.1063/1.121801 |
|---|---|
| OpenAlex | W2000432206 |
Access
| Landing page | https://doi.org/10.1063/1.121801 |
|---|
From OpenAlex, which stores abstracts as an index of words and their positions: what is shown is rebuilt from that, and reads fluently whether or not it is what the author wrote.
Abstract
We report on the implementation of crystal ion slicing in lithium niobate (LiNbO3). Deep-ion implantation is used to create a buried sacrificial layer in single-crystal c-cut poled wafers of LiNbO3, inducing a large etch selectivity between the sacrificial layer and the rest of the sample. 9-μm-thick films of excellent quality are separated from the bulk and bonded to silicon and gallium arsenide substrates. These single-crystal films have the same room-temperature dielectric and pyroelectric characteristics, and ferroelectric transition temperature as single-crystal bulk. A stronger high-temperature pyroelectric response is found in the films.
How it got here
| How it got here | agent via openalex |
|---|---|
| Added | 2026-10-28 03:25 UTC |
| Not denied by | a person 2026-10-29 17:12 UTC |
Cite it as
@article{levy1998fabrication,
title = {Fabrication of single-crystal lithium niobate films by crystal ion slicing},
author = {M. Levy and Richard M. Osgood and R. Liu and Leslie Eric Cross and G. S. Cargill and Abhishek Kumar and H. Bakhru},
year = {1998},
journal = {Applied Physics Letters},
publisher = {American Institute of Physics},
volume = {73},
number = {16},
pages = {2293--2295},
doi = {10.1063/1.121801},
}
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