Foundry Developments Toward Silicon Nitride Photonics From Visible to the Mid-Infrared
The work
| Authors | Pascual Muñoz; Paul W. L. van Dijk; Douwe H. Geuzebroek; Michael Geiselmann; Carlos Domı́nguez; Andim Stassen; David Doménech; Michael Zervas; Arne Leinse; Chris G. H. Roeloffzen; Bernardo Gargallo; Rocío Baños; Juan Fernandez; Gloria Micó; Luis Alberto Bru; Daniel Pastor |
|---|---|
| Editors | |
| Type | article |
| Year | 2019 |
| Citekey | munoz2019foundry |
Where it appeared
| Published in | IEEE Journal of Selected Topics in Quantum Electronics |
|---|---|
| Publisher | IEEE Photonics Society |
| Volume | 25 |
| Issue | 5 |
| Pages | 1--13 |
Identifiers
| DOI | 10.1109/jstqe.2019.2902903 |
|---|---|
| OpenAlex | W2921768092 |
Access
| Landing page | https://doi.org/10.1109/jstqe.2019.2902903 |
|---|
From OpenAlex, which stores abstracts as an index of words and their positions: what is shown is rebuilt from that, and reads fluently whether or not it is what the author wrote.
Abstract
Photonic integration technologies have spread in the past decade by means of foundry models that mirror the electronic-integrated circuit industry developments of the past century. Several monolithic technologies exist, based on silicon and III-V semiconductors. In this paper, we discuss the current state and forthcoming developments of open access photonic foundries whose technology platforms are based on silicon nitride material. The paper presents various silicon nitride technologies and foundries, alongside with access models supported by generic integration and process design kits. Technical features, enabled by different micro-fabrication processes and tools are summarized. Application examples and developments of forthcoming incorporation into these platforms are outlined.
How it got here
| How it got here | agent via openalex |
|---|---|
| Added | 2026-10-28 02:47 UTC |
| Not denied by | a person 2026-10-29 17:12 UTC |
Cite it as
@article{munoz2019foundry,
title = {Foundry Developments Toward Silicon Nitride Photonics From Visible to the Mid-Infrared},
author = {Pascual Muñoz and Paul W. L. van Dijk and Douwe H. Geuzebroek and Michael Geiselmann and Carlos Domı́nguez and Andim Stassen and David Doménech and Michael Zervas and Arne Leinse and Chris G. H. Roeloffzen and Bernardo Gargallo and Rocío Baños and Juan Fernandez and Gloria Micó and Luis Alberto Bru and Daniel Pastor},
year = {2019},
journal = {IEEE Journal of Selected Topics in Quantum Electronics},
publisher = {IEEE Photonics Society},
volume = {25},
number = {5},
pages = {1--13},
doi = {10.1109/jstqe.2019.2902903},
}
This record lives at https://refs.drheap.org/munoz2019foundry/ and will keep doing so.