The bibliographic entry was discovered and compiled by a machine, and published without a person checking it against the publication. The publication itself is the authors' own work — this badge says nothing about it.
Modular model-based supervisory controller design for wafer logistics in lithography machines
The work
| Authors | L. J. van der Sanden; M. A. Reniers; M. C. W. Geilen; T. Basten; J. Jacobs; J. P. M. Voeten; R. R. H. Schiffelers |
|---|---|
| Editors | |
| Type | misc |
| Year | 2015 |
| Also known as | anon2015modular |
| Citekey | vandersanden2015modular |
Where it appeared
| Publisher | IEEE |
|---|
Identifiers
| DOI | 10.1109/models.2015.7338273 |
|---|
How it got here
| How it got here | agent via unpaywall |
|---|---|
| Added | 2026-10-27 02:13 UTC |
| Not denied by | a person 2026-10-29 17:12 UTC |
Cite it as
@misc{vandersanden2015modular,
title = {Modular model-based supervisory controller design for wafer logistics in lithography machines},
author = {L. J. van der Sanden and M. A. Reniers and M. C. W. Geilen and T. Basten and J. Jacobs and J. P. M. Voeten and R. R. H. Schiffelers},
year = {2015},
publisher = {IEEE},
doi = {10.1109/models.2015.7338273},
}
This record lives at https://refs.drheap.org/vandersanden2015modular/ and will keep
doing so. It used to be called anon2015modular, and those addresses still resolve to this one.