Computational lithography: Driving nanometer precision in microchip manufacturing
The work
| Authors | ASML |
|---|---|
| Editors | |
| Type | video |
| Year | 2024 |
| Also known as | asml2024computational |
| Citekey | asml2021computational |
Where it appeared
| Publisher | YouTube |
|---|
Access
| Landing page | https://www.youtube.com/watch?v=9RZreu5z_Gc |
|---|
Empty on purpose
| abstract, container, copy, doi |
How it got here
| How it got here | agent via bibtex |
|---|---|
| Added | 2026-08-29 11:11 UTC |
| Approved by | a person 2026-08-30 00:16 UTC |
Filed under
Cite it as
@misc{asml2021computational,
title = {Computational lithography: Driving nanometer precision in microchip manufacturing},
author = {ASML},
year = {2024},
publisher = {YouTube},
}
This record lives at https://refs.drheap.org/asml2021computational/ and will keep
doing so. It used to be called asml2024computational, and those addresses still resolve to this one.