This description was written by a machine and published without a person checking it. It is what the agent made of this grouping, and not a statement anybody has stood behind.
How the chip is actually made
A subject the papers are about. The loosest grouping, and the one to reach for last.
Fabrication from lithography through etch, process control and yield. Membership: the process, not the device. Mostly video explainers: reliable for mechanism and order, not to be cited for numbers.
13 references
Why Wafer Bonding is the Future of Semiconductors
Asianometry (2024) · YouTube · video
Computational lithography: Driving nanometer precision in microchip manufacturing
ASML (2024) · YouTube · video
Doping: The Most Important Part of Making Semiconductors
ProjectsInFlight (2024) · YouTube · video
Speedrunning 30yrs of lithography technology
Breaking Taps (2024) · YouTube · video
How To Make A Chip
Applied Materials (2023) · YouTube · video
Imaging at ASML
Huygens Optics (2023) · YouTube · video
How Carl Zeiss Crafts Optics for a $150 Million EUV Machine
Asianometry (2021) · YouTube · video
DIY Photolithography using 1980s Carl Zeiss S-Planar Lens (405nm)
Huygens Optics (2019) · YouTube · video
Fundamentals of Semiconductor Manufacturing and Process Control
Gary S. May and others (2006) · Wiley
Microlithography cost analysis
B. Bruggeman (1999) · Interface '99 Symposium
Multivariable control, simulation, optimization and signal processing for the microlithographic process
T. Kailath (1997) · Stanford University (Multidisciplinary University Research Initiative report)
Method of Treating Silicon
Joseph R. Ligenza (1960) · United States Patent and Trademark Office
Fabrication of Semiconductor Devices Having Stable Surface Characteristics
M. M. Atalla and others (1959) · United States Patent and Trademark Office