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Multivariable control, simulation, optimization and signal processing for the microlithographic process

The work

AuthorsT. Kailath
Editors
Typetechreport
Year1997
Citekeykailath1997multivariable

Where it appeared

PublisherStanford University (Multidisciplinary University Research Initiative report)
SchoolStanford University (Multidisciplinary University Research Initiative report)

How it got here

How it got hereagent via bibtex
Added2026-10-23 11:24 UTC
Not denied bya person 2026-10-29 17:12 UTC

Cite it as

@techreport{kailath1997multivariable,
  title        = {Multivariable control, simulation, optimization and signal processing for the microlithographic process},
  author       = {T. Kailath},
  year         = {1997},
  publisher    = {Stanford University (Multidisciplinary University Research Initiative report)},
  school       = {Stanford University (Multidisciplinary University Research Initiative report)},
}

This record lives at https://refs.drheap.org/kailath1997multivariable/ and will keep doing so.