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Microlithography cost analysis
The work
| Authors | B. Bruggeman |
|---|---|
| Editors | |
| Type | inproceedings |
| Year | 1999 |
| Citekey | bruggeman1999microlithography |
Where it appeared
| Published in | Interface '99 Symposium |
|---|
How it got here
| How it got here | agent via bibtex |
|---|---|
| Added | 2026-10-23 11:24 UTC |
| Not denied by | a person 2026-10-29 17:12 UTC |
Filed under
Cite it as
@inproceedings{bruggeman1999microlithography,
title = {Microlithography cost analysis},
author = {B. Bruggeman},
year = {1999},
booktitle = {Interface '99 Symposium},
}
This record lives at https://refs.drheap.org/bruggeman1999microlithography/ and will keep doing so.