Stabilization of Silicon Surfaces by Thermally Grown Oxides
The work
| Authors | M. M. Atalla; Eileen Tannenbaum; Edwin J. Scheibner |
|---|---|
| Editors | |
| Type | article |
| Year | 1959 |
| Citekey | atalla1959stabilization |
Where it appeared
| Published in | Bell System Technical Journal |
|---|---|
| Publisher | Institute of Electrical and Electronics Engineers |
| Volume | 38 |
| Issue | 3 |
| Pages | 749--783 |
Identifiers
| DOI | 10.1002/j.1538-7305.1959.tb03907.x |
|---|---|
| OpenAlex | W2036293827 |
Access
| Landing page | https://doi.org/10.1002/j.1538-7305.1959.tb03907.x |
|---|---|
| Free full text | https://archive.org/download/bstj38-3-749/bstj38-3-749_text.pdf |
Related
| Distinct from | atalla1959fabrication |
|---|---|
| Distinct from | kahng1963electric |
From OpenAlex, which stores abstracts as an index of words and their positions: what is shown is rebuilt from that, and reads fluently whether or not it is what the author wrote.
Abstract
A study has been carried out of the stability of silicon surfaces when they are provided with a chemically bound solid-solid interface. Stable surfaces have been obtained with the system silicon-silicon dioxide when the oxide is thermally grown. This latter system has been studied in some detail. In this paper the following phases of our investigation are presented: (i) some aspects of the thermal oxidation process and properties of the oxide; (ii) the electronic properties of the resulting silicon-silicon dioxide interface; (iii) the application of the process to devices and resulting device characteristics.
A copy is held
pdf, 863.5 kB. Not published — it may be under copyright. The facts and links here are.
How it got here
| How it got here | agent via openalex |
|---|---|
| Added | 2026-09-03 05:03 UTC |
| Approved by | a person 2026-09-23 14:12 UTC |
Cite it as
@article{atalla1959stabilization,
title = {Stabilization of Silicon Surfaces by Thermally Grown Oxides},
author = {M. M. Atalla and Eileen Tannenbaum and Edwin J. Scheibner},
year = {1959},
journal = {Bell System Technical Journal},
publisher = {Institute of Electrical and Electronics Engineers},
volume = {38},
number = {3},
pages = {749--783},
doi = {10.1002/j.1538-7305.1959.tb03907.x},
}
This record lives at https://refs.drheap.org/atalla1959stabilization/ and will keep doing so.